D6F Series MEMS Flow Sensors

Omron Electronics D6F MEMS Flow Sensors and Velocity Sensors are compact, highly reliable sensors with a unique cyclone flow structure that diverts particulate from the sensor element. As an alternative to differential pressure sensing or for detecting clogged filters, the D6F series is available in PCB-mounted, flange-mount, and connector models. The D6F-P 0.1 LPM version MEMS Flow Sensor is targeted at ultra low-flow applications and measures up to 200 LPM with a bypass set-up.

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Qty. RoHS ECAD Model Type
For Use With
Range
Accuracy
Output Voltage
Operating Supply Voltage
Port Size
Housing Material
Omron Electronics Flow Sensors MEMS FLOW SENSOR
Datasheet
8In Stock
Min.: 1
Mult.: 1

MEMS Flow Sensor Air 0 L/min to 50 L/min 3 % 3 V to 3.6 V 18 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS Airflow Sensor Air 0-10 LPM
Datasheet
28In Stock
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 10 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V Thermoplastic (TP)
Omron Electronics Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec
Datasheet
617In Stock
Min.: 1
Mult.: 1

Air Velocity Sensor Air 0 m/s to 3 m/s 10 % 0 V to 2 V 3.15 V to 9.45 V 2 mm x 3 mm Thermoplastic (TP)
Omron Electronics Flow Sensors MEMS Airflow Sensor Air 0-20 LPM
Datasheet
4In Stock
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 20 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V Thermoplastic (TP)
Omron Electronics Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR
Datasheet
3In Stock
35Expected 10/30/2026
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 20 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 6.35 mm Thermoplastic (TP), Aluminum alloy
Omron Electronics Flow Sensors MEMS FLOW SENSOR
Datasheet
8In Stock
Min.: 1
Mult.: 1

MEMS Flow Sensor Air 0 L/min to 20 L/min 5 % 3 V to 3.6 V 13 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter
Datasheet
1,290In Stock
1,075Expected 10/30/2026
Min.: 1
Mult.: 1

Mass Air Flow Sensor Air 0 L/min to 1 L/min 4.75 V to 9.45 V Polybutylene Terephthalate (PBT)

Omron Electronics Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000
Datasheet
393In Stock
Min.: 1
Mult.: 1

Accessory, Cable Cable for MEMS Mass Flow Sensor D6F-03A3-000 1 V to 5 V

Omron Electronics Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term
Datasheet
121In Stock
205Expected 8/17/2026
Min.: 1
Mult.: 1

MEMS Air Flow Sensor Air 0 L/min to 0.1 L/min 2 % 4 V 4.75 V to 9.45 V Polybutylene Terephthalate (PBT)

Omron Electronics Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto
Datasheet
259In Stock
325Expected 11/6/2026
Min.: 1
Mult.: 1

Mass Air Flow Sensor Air 0 L/min to 1 L/min 0 V to 3.1 V 4.75 V to 9.45 V Polybutylene Terephthalate (PBT)
Omron Electronics Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec
Datasheet
110In Stock
60Expected 10/2/2026
Min.: 1
Mult.: 1

Air Velocity Sensor Air 0 m/s to 1 m/s 5 % 1 V to 5 V 10.8 V to 26.4 V 2.6 mm x 5 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec
Datasheet
25In Stock
255Expected 9/4/2026
Min.: 1
Mult.: 1

Air Velocity Sensor Air 0 m/s to 4 m/s 5 % 1 V to 5 V 10.8 V to 26.4 V 2.6 mm x 5 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS Velocity Sensor 10m/sec
Datasheet
71In Stock
Min.: 1
Mult.: 1

Air Velocity Sensor Air 0 m/s to 10 m/s 5 % 6 V 10.8 V to 26.4 V 2.6 mm x 5 mm Polyphenylene Sulfide (PPS)
Omron Electronics Flow Sensors MEMS air 0-10L/min
Datasheet
5In Stock
5Expected 10/30/2026
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 10 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 5 mm Thermoplastic (TP), Aluminum alloy

Omron Electronics Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR
Datasheet
4In Stock
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 50 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 6.35 mm Thermoplastic (TP), Aluminum alloy
Omron Electronics Flow Sensors Cable for D6F-P MEMS Flow Sensors
Datasheet
88In Stock
102Expected 11/6/2026
Min.: 1
Mult.: 1

Accessory, Cable Cable for MEMS Air Flow Sensor D6F-10A, -20A, -50A
Omron Electronics Flow Sensors CABLE FOR D6F
Datasheet
39In Stock
Min.: 1
Mult.: 1
Accessory, Cable MEMS Flow Sensor
Omron Electronics Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR
Datasheet
43Expected 11/20/2026
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 10 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 6.35 mm Thermoplastic (TP), Aluminum alloy
Omron Electronics Flow Sensors MEMS FLOW SENSOR
Datasheet
10Expected 9/11/2026
Min.: 1
Mult.: 1

MEMS Flow Sensor Air 0 L/min to 10 L/min 5 % 3 V to 3.6 V 13 mm Polyphenylene Sulfide (PPS)

Omron Electronics Flow Sensors MEMS Flow Sensor Manifold Mount
Datasheet
100On Order
Min.: 1
Mult.: 1

MEMS Air Flow Sensor Air 0 L/min to 1 L/min 2 % 4 V 4.75 V to 9.45 V Polybutylene Terephthalate (PBT)
Omron Electronics Flow Sensors MEMS Micro-Flow Sensor
Datasheet
Non-Stocked Lead-Time 28 Weeks
Min.: 1
Mult.: 1

Micro-Flow Sensor City Gas 0 L/min to 5 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V
Omron Electronics Flow Sensors MEMS air 0-50L/min
Datasheet
Non-Stocked Lead-Time 26 Weeks
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 50 L/min 3 % 1 V to 5 V 10.8 V to 26.4 V 5 mm Thermoplastic (TP), Aluminum alloy


Omron Electronics Flow Sensors FLOW SENSOR
Datasheet
Non-Stocked Lead-Time 26 Weeks
Min.: 1
Mult.: 1

MEMS Mass Flow Sensor Air 0 L/min to 50 L/min
Omron Electronics Flow Sensors MEMS FLOW SENSOR
Datasheet
Non-Stocked Lead-Time 26 Weeks
Min.: 1
Mult.: 1

MEMS Flow Sensor Air 0 L/min to 70 L/min 3 % 3 V to 3.6 V 18 mm Polyphenylene Sulfide (PPS)
Omron Automation and Safety D6FZ-FC03
Omron Automation and Safety Flow Sensors D6FZ-FGT Mntg Bracket
Datasheet
Non-Stocked
Min.: 1
Mult.: 1